共振型マイクロ化学センサへの感応膜塗布特性の制御のための表面微細パターンの利用

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/08/01

タイトル(英語): Sub-Micron-Wide Surficial Trench Frames to Define the Coating Areas of Sensitive Layers on Silicon MEMS Resonant Chemical Sensors

著者名: 村上 直（産業技術総合研究所），池原 毅（産業技術総合研究所），昆野 舜夫（産業技術総合研究所），前田龍太郎（産業技術総合研究所），布川 正史（信州大学），木村 睦（信州大学），三原 孝士（オリンパス（株））

著者名(英語): Sunao Murakami (National Institute of Advanced Industrial Science and Technology), Tsuyoshi Ikehara (National Institute of Advanced Industrial Science and Technology), Mitsuo Konno (National Institute of Advanced Industrial Science and Technology), Ryutaro Maeda (National Institute of Advanced Industrial Science and Technology), Tadashi Fukawa (Shinshu University), Mutsumi Kimura (Shinshu University), Takashi Mihara (Olympus Corporation)

キーワード: 表面微細パターン，ポリマー塗布，シリコン振動子，カンチレバー，化学センサ　　surficial pattern，polymer coating，silicon resonator，cantilever，chemical sensor

要約(英語): We propose a new processing method to form polymeric thin films on defined areas of movable parts of microdevices by using trench frames on the device surfaces. We fabricated additional surficial trench frames on silicon microcantilevers to define the areas coated with the polymeric films by increasing the tolerance to protrusion of a liquid droplet from the edge in the coating process. The 500 nm-wide trench frames were fabricated on the silicon surfaces by deep-reactive ion etching process with the resist mask patterned by electron beam lithography. We also fabricated the same trench frames on planer silicon substrates, and we formed polybutadiene (PBD) thin films on the surfaces using a microdispenser system. When the n-dodecane solution of PBD was coated on the micro-area framed by the trenches, PBD film was successfully defined within the framed area. The trench frames fabricated on the cantilevers also indicated the possible effectiveness to define the coated PBD films in the framed areas.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.8 （2011） 特集：先進自動車を支えるセンシング技術

本誌掲載ページ: 296-301 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/8/131_8_296/_article/-char/ja/