FeGa／PZT積層型の高感度磁気センサの検討

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/09/01

タイトル(英語): Evaluation of High-Sensitivity FeGa/PZT Stacked-Layer Magnetic Sensor

著者名: 浜島　美央（千葉工業大学），斉藤　千尋（並木精密宝石（株）），中村　元一（並木精密宝石（株）），室　英夫（千葉工業大学）

著者名(英語): Mio Hamashima (Chiba Institute of Technology), Chihiro Saito (NAMIKI PRECISION JEWEL CO., LTD.), Motoichi Nakamura (NAMIKI PRECISION JEWEL CO., LTD.), Hideo Muro (Chiba Institute of Technology)

キーワード: 磁気センサ，磁歪，圧電，積層　　magnetic sensor，magnetostrictive，piezoelectric，stacked layer

要約(英語): The FeGa/PZT stacked-layer magnetic sensor was studied. The prototype sensor is 15mm long and 6mm wide with two 880μm-thick FeGa layers and a 590μm-thick PZT layer. The theoretical sensitivity using a simple model was calculated to be 69.6mV/Oe. The resonant modes were analyzed using a FEM simulator, resulting in the fundamental resonant frequency of 5.38kHz. A magnetic field was applied to the longitudinal direction of the sensor to cause a longitudinal stress magnetostrictively, which produces a piezoelectric output voltage in the PZT layer. The dependences of the magnetic sensitivity on the DC bias magnetic field were evaluated, together with the frequency characteristics and the temperature dependences. The measured sensitivity agreed roughly with the calculated one. A prototype with a single magnetostrictive layer was also fabricated and evaluated for investigating the possibility of the resonant sensor.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.9 （2011）

本誌掲載ページ: 322-326 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/9/131_9_322/_article/-char/ja/