Bimorph Cantilevers Actuated by Focused Laser from the Side

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/09/01

タイトル(英語): Bimorph Cantilevers Actuated by Focused Laser from the Side

著者名: Masaya Toda (Graduate School of Engineering, Tohoku University), Naoki Inomata (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

著者名(英語): Masaya Toda (Graduate School of Engineering, Tohoku University), Naoki Inomata (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

キーワード: bimorph，cantilever，heat sensing

要約(英語): The thin and long bimorph cantilever is mechanically responded in motion depending on the position of the heating laser which is focused from the side. The bimorph cantilever was designed in order to detect the heat from a bio cell in liquid. In the calibration process of the cantilever using a focused laser in vacuum and air, we found the quick and interesting responses of bimorph cantilever, which is vibrated and statically deflected due to the position of the local heat source on the cantilever. The deflections of cantilever have been investigated with a developed model. The responses are expressed by the modeled system with heat loss condition into ambient. To define the temperature distributions on the cantilever using a model, the temperature increments at the end of cantilever are successfully estimated to be +20 K in air and +110 K in vacuum with a laser power of 0.17 mW.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.9 （2011）

本誌掲載ページ: 327-331 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/9/131_9_327/_article/-char/ja/