静電容量検出型集積化MEMS慣性センサの固有振動数設計

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/10/01

タイトル(英語): Natural Frequency Design for an Integrated Capacitive MEMS Inertial Sensor

著者名: 鄭 希元（（株）日立製作所 中央研究所），出川 宗里（（株）日立製作所 中央研究所），後藤 康（（株）日立製作所 中央研究所）

著者名(英語): Heewon Jeong (Central Research Laboratory, Hitachi, Ltd.), Munenori Degawa (Central Research Laboratory, Hitachi, Ltd.), Yasushi Goto (Central Research Laboratory, Hitachi, Ltd.)

キーワード: 集積化慣性センサ，角速度センサ，加速度センサ，メムス，自動車横滑り防止システム　　Integrated inertial sensor，Angular rate sensor，Accelerometer，MEMS，Electronic stability control system

要約(英語): A capacitive microelectromechanical systems (MEMS) inertial sensor that is able to measure an acceleration and angular rate (rotation) simultaneously has been developed. Integration is the only practical approach to realizing low-cost and small-size sensors, largely because both assembling and aligning tasks for individual sensors such as for accelerometers and gyroscopes are eliminated. In this paper the developed sensor shares mechanical parts such as seismic masses and suspensions as well as electrical parts such as a capacitive-voltage conversion circuits for measuring different inertial information such as acceleration and angular rate. We report the design scheme for the natural frequencies of the inertial sensor element with which the mechanical parts and detection circuits are shared for a specific application such as for a vehicle electronic stability control system. This design scheme can also be applied for a device that contains peripheral circuits on the sensor element as well.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.10 （2011） 特集：集積化センサとその設計・製作

本誌掲載ページ: 357-362 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/10/131_10_357/_article/-char/ja/