Fundamental Adsorption Properties for Low Molecular Weight Alcohols in Fluorocarbon Thin Films Deposited onto Quartz Crystal Microbalance Electrode by an R.F. Sputtering and Spin Coating

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/06/01

タイトル(英語): Fundamental Adsorption Properties for Low Molecular Weight Alcohols in Fluorocarbon Thin Films Deposited onto Quartz Crystal Microbalance Electrode by an R.F. Sputtering and Spin Coating

著者名: Satoru Iwamori (School of Engineering, Tokai University), Takaaki Miyamoto (School of Engineering, Tokai University), Yuki Ikeda (School of Engineering, Tokai University), Yasutaka Ohnishi (School of Engineering, Tokai University), Kazutoshi Noda (Nationa

著者名(英語): Satoru Iwamori (School of Engineering, Tokai University), Takaaki Miyamoto (School of Engineering, Tokai University), Yuki Ikeda (School of Engineering, Tokai University), Yasutaka Ohnishi (School of Engineering, Tokai University), Kazutoshi Noda (National Institute of Advanced Industrial Science and Technology (AIST))

キーワード: Volatile organic compounds (VOCs)，Quartz crystal microbalance (QCM)，R.f. sputtering，Spin coating，Poly(tetrafluoroethylene) (PTFE)

要約(英語): Highly sensitive detection methods for volatile organic compounds (VOCs) are needed in working environment handling the VOCs. The use of a quartz crystal microbalance (QCM) is one such method, and many studies have been carried out on the deposition of metallic, inorganic and organic thin films onto QCM surfaces for use as sensors. In this paper, we report on adsorption properties of fluorocarbon thin films deposited onto the QCM electrode by an r.f. sputtering and spin coating for low molecular weight VOCs such as aliphatic alcohols and acetone. Adsorption mass of these VOC molecules in the fluorocarbon thin film deposited by the r.f. sputtering were much higher than that in the thin film deposited by the spin coating. It is known that molecular structures of fluorocarbon thin films sputtered with a Poly(tetrafluoroethylene) (PTFE) target were quite different from pristine PTFE. It is considered that this is one of reasons why the adsorption mass in the thin film deposited by the r.f. sputtering was higher than that in the thin film deposited by the spin coating.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.6 （2012） 特集：食の安全・安心と健康に関わるセンシング

本誌掲載ページ: 149-153 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/6/132_149/_article/-char/ja/