液体分析用デュアル水晶センサの開発

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/07/01

タイトル(英語): Development of Dual Quartz Sensor for Liquid Analysis

著者名: 武石　大一（新潟大学大学院 自然科学研究科），江村　恵渡（新潟大学大学院 自然科学研究科），安部　隆（新潟大学大学院 自然科学研究科）

著者名(英語): Taichi Takeishi (Graduate School of Science and Technology, Niigata University), Keito Emura (Graduate School of Science and Technology, Niigata University), Takashi Abe (Graduate School of Science and Technology, Niigata University)

キーワード: 水晶センサ，液体センサ，MEMS　　quartz sensor，liquid sensor，MEMS

要約(英語): A dual quartz sensor has been developed which enables the analyses of physicochemical properties of liquids. In this sensor, an ACR (Antiparallel Coupled Resonator) type quartz sensor and a LFE (Lateral Field Excited) type quartz sensor were fabricated on a same plate. The ACR can measure frequency response caused by a mechanical characteristic (viscoelasticity) of liquids. The LFE can measure frequency response caused by both the mechanical characteristic and the electrical characteristics (conductivity and dielectric constant) of liquids. By subtracting the frequency shift of the LFE and the ACR, the dual quartz sensor is possible to calculate the electrical characteristics. Therefore the dual quartz sensor allowed simultaneous measurements of electrical characteristics and the mechanical characteristic of a liquid.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.7 （2012）

本誌掲載ページ: 174-177 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/7/132_174/_article/-char/ja/