ホール素子特性における応力依存性の検討
ホール素子特性における応力依存性の検討
カテゴリ: 論文誌(論文単位)
グループ名: 【E】センサ・マイクロマシン部門
発行日: 2012/07/01
タイトル(英語): Study on Dependence of Stress on the Hall Element Characteristics
著者名: 庄司 真弘(千葉工業大学),浜島 美央(TDK(株)),室 英夫(千葉工業大学)
著者名(英語): Masahiro Shoji (Chiba Institute of Technology), Mio Hamashima (TDK Corporation), Hideo Muro (Chiba Institute of Technology)
キーワード: ホール素子,応力,テストデバイス,片持ち梁 Hall element,stress,test device,cantilever
要約(英語): Test devices for evaluating the stress effect on Hall element have been designed and fabricated using a simple SOI-MEMS process, where a Hall element is incorporated onto a micromachined cantilever together with floating electrodes connecting the input/output terminals of the Hall element. The predetermined stress was applied by pushing down the tip of the cantilever using a stimulus attached to the XYZ manipulator. The test devices of <110> and <100> directions were measured, whose magnetic sensitivities were increased by 6.5% and 12%, respectively, by applying the stress of 218 MPa. These experimental results agreed reasonably with the calculated values using a simple model.
本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.132 No.7 (2012)
本誌掲載ページ: 178-182 p
原稿種別: 論文/日本語
電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/7/132_178/_article/-char/ja/
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