オゾン水による金属エッチングの研究

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/11/01

タイトル(英語): Study of Metal Etching using Ozone Water

著者名: 羽月　竜治（東京工業大学 理工学研究科 機械制御システム専攻），山本　貴富喜（東京工業大学 理工学研究科 機械制御システム専攻）

著者名(英語): Ryuji Hatsuki (Tokyo Institute of Technology), Takatoki Yamamoto (Tokyo Institute of Technology)

キーワード: オゾン水，金属，エッチング，原子的平滑表面　　Ozone water，Metal，Etching，Atomic-flat surface

要約(英語): We have proposed and experimentally demonstrated an environmentally friendly, simple, and inexpensive etching method for metal by ozone water. We experimentally measured the dependencies of ozone water etching on the temperature and ozone concentration for several metals (Cr, Ni, Al, Au, and Ti) and we also evaluated the surface roughness of the etched surface. The etching mechanism by ozone water can be explained by activation energy obtained by Arrhenius plot and a pH-potential diagram. As a result, it was found that the etching rate was proportional to the dissolved ozone concentration and temperature and that atomically flat surface was obtained after etching with ozone water, even though it was found that the etching rate was very low at a few tens of nanometers per hour. It is therefore difficult to use it for performing conventional macro- and micro-scale etching, whereas its rate is sufficiently high to use it for the nanoscale (i.e., a few tens of nanometers) metal etching in nanoscience and nanotechnology.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.11 （2012）

本誌掲載ページ: 413-419 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/11/132_413/_article/-char/ja/