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Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges

Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges

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カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/11/01

タイトル(英語): Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges

著者名: Liang He (Graduate School of Engineering, Tohoku University), Masaya Toda (Microsystem Integration Center, Tohoku University), Yusuke Kawai (Graduate School of Engineering, Tohoku University), Mohd Faizul Sarbi (Faculty of Engineering, University of Malay

著者名(英語): Liang He (Graduate School of Engineering, Tohoku University), Masaya Toda (Microsystem Integration Center, Tohoku University), Yusuke Kawai (Graduate School of Engineering, Tohoku University), Mohd Faizul Sarbi (Faculty of Engineering, University of Malaya), Mamoru Omori (Fracture and Reliability Research Institute, Tohoku University), Toshiyuki Hashida (Fracture and Reliability Research Institute, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

キーワード: Microstage,Carbon nanotube,PZT actuators,Microfabrication

要約(英語): A Si-PZT (PbZrTiO3) hybrid XY-microstage with "carbon nanotube (CNT)-carbon composite" hinges is designed and fabricated. The CNT-carbon composite is partially used for the flexible hinge parts in the Si-PZT hybrid XY-microstage. The CNT-carbon composite has a low elastic constant and no mechanical hysteresis. The CNT-carbon hinge parts are formed by the process including micromolding and pyrolysis. Then, two stacked PZT actuators are assembled into the XY-microstage.

本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.132 No.11 (2012)

本誌掲載ページ: 425-426 p

原稿種別: 研究開発レター/英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/11/132_425/_article/-char/ja/

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