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感応膜を修飾したQCMによるCO2濃度センサ

感応膜を修飾したQCMによるCO2濃度センサ

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カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/01/01

タイトル(英語): CO2 Sensor using Quartz Crystal Microbalance Coated with Sensitive Membrane

著者名: 村岡 茂信(大阪工業大学),清原 裕弥(大阪工業大学),大植 弘義(大阪工業大学),東本 慎也(大阪工業大学)

著者名(英語): Shigenobu Muraoka (Osaka Institute of Technology), Yuya Kiyohara (Osaka Institute of Technology), Hiroyoshi Oue (Osaka Institute of Technology), Shinya Higashimoto (Osaka Institute of Technology)

キーワード: CO2センサ,水晶振動子式微量天秤(QCM),感応膜としてのアクリロニトリルスチレン(AS)  CO2 sensor,quartz crystal microbalance (QCM),acrylonitrile-styrene copolymer (AS) as sensitive membrane

要約(英語): We tried to make a CO2 sensor using a quartz crystal microbalance (QCM) coated with acrylonitrile-styrene copolymer (AS). Concentration of CO2 gas diluted with dry N2 gas was measured using the QCM whose output is frequency shift. Sensitivity of the QCM to Ar, O2 and humidity was also examined because atmosphere is composed of N2, O2, CO2, Ar and water vapor. Consequently it was revealed that the QCM coated with AS is sensitive to not only CO2 but humidity and insensitive to O2 and Ar. Next relationships between concentration of CO2 gas diluted with damp N2 gas and frequency shift of the QCM were examined. Consequently it was clarified that the frequency shift compensated for influence of humidity is nearly equal to the frequency shift caused by CO2 gas diluted with dry N2 gas. Accordingly it was shown that concentration of CO2 gas in atmosphere can be measured using the QCM. Furthermore it was found that sensitivity to concentration of CO2 and humidity grows higher with increasing thickness of AS membrane.

本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.133 No.1 (2013)

本誌掲載ページ: 20-25 p

原稿種別: 論文/日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/1/133_20/_article/-char/ja/

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