Basic Characteristics of Ion-balance/neutralizing Current Sensor for AC Corona Air Ionizer using Grounded Ring Electrode

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/03/01

タイトル(英語): Basic Characteristics of Ion-balance/neutralizing Current Sensor for AC Corona Air Ionizer using Grounded Ring Electrode

著者名: Takashi Terashige (Hiroshima International University), Yasuna Hirata (Polytechnic University), Nana Iwamoto (Polytechnic University), Kazuo Okano (Polytechnic University)

著者名(英語): Takashi Terashige (Hiroshima International University), Yasuna Hirata (Polytechnic University), Nana Iwamoto (Polytechnic University), Kazuo Okano (Polytechnic University)

キーワード: ionizer，neutralizing current，ion balance，sensor，corona discharge，semiconductor manufacturing

要約(英語): A new ion-balance/neutralizing current sensor for an AC corona ionizer was proposed and investigated by using a grounded ring electrode. Both the positive and the negative conduction currents can be measured independently using the proposed sensor. The sensor can cancel and eliminate the influence of the electric field from the emitter tip.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.3 （2013） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 72-76 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/3/133_72/_article/-char/ja/