Wavelength Characteristics of Gap-Variable Silicon Nanowire Waveguide Coupler Switch Using Micro Actuator
Wavelength Characteristics of Gap-Variable Silicon Nanowire Waveguide Coupler Switch Using Micro Actuator
カテゴリ: 論文誌(論文単位)
グループ名: 【E】センサ・マイクロマシン部門
発行日: 2013/03/01
タイトル(英語): Wavelength Characteristics of Gap-Variable Silicon Nanowire Waveguide Coupler Switch Using Micro Actuator
著者名: Yasushi Munemasa (Tohoku University), Yuta Akihama (Tohoku University), Kazuhiro Hane (Tohoku University)
著者名(英語): Yasushi Munemasa (Tohoku University), Yuta Akihama (Tohoku University), Kazuhiro Hane (Tohoku University)
キーワード: MEMS,coupler switch,nanowire waveguide,micro actuator
要約(英語): An improved gap-variable silicon nanowire waveguide coupler switch equipped with a micro actuator was designed and its wavelength characteristics were investigated. The coupler switch was assembled on a silicon-on-insulator wafer from an electrostatic comb-drive actuator and two submicron-scale freestanding single-mode waveguides. One waveguide was movable and the other was fixed. The movable waveguide was held by two supporting arms connected to the actuator. When a voltage is applied to the electrodes of the actuator, the gap between the waveguides reduces, allowing light travelling from the input waveguide to transfer to the output. The coupler was symmetrically shaped with respect to the center line between the waveguides to avoid asymmetric electromagnetic distribution. Port isolation of 18.5 dB was obtained at a wavelength of 1.55 µm, and the bandwidth over which the port isolation was higher than -10 dB was approximately 60 nm. These characteristics are suitable for a matrix switch in wavelength-division multiplexing.
本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.133 No.3 (2013) 特集:センサ・マイクロマシン英文特集号
本誌掲載ページ: 85-89 p
原稿種別: 論文/英語
電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/3/133_85/_article/-char/ja/
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