Miniaturized Methanol Concentration Sensor Developed using a Quartz Resonator Connected in Series to an Interdigital Capacitor

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/03/01

タイトル(英語): Miniaturized Methanol Concentration Sensor Developed using a Quartz Resonator Connected in Series to an Interdigital Capacitor

著者名: Shunpei Ishii (Gradate School of Science and Technology, Niigata University), Keito Emura (Gradate School of Science and Technology, Niigata University), Takashi Abe (Gradate School of Science and Technology, Niigata University)

著者名(英語): Shunpei Ishii (Gradate School of Science and Technology, Niigata University), Keito Emura (Gradate School of Science and Technology, Niigata University), Takashi Abe (Gradate School of Science and Technology, Niigata University)

キーワード: Quartz resonator，interdigital capacitor，methanol sensor

要約(英語): This paper reports the development of a monolithic methanol concentration sensor for fuel cell applications. An interdigital capacitor and a resonator are fabricated on a single crystal quartz substrate. Methanol solution is introduced into a microchannel on the capacitor. The methanol concentration can be measured by measuring the frequency shift of the resonator because the shift shows a monotonic increase with a change in the relative permittivity of the capacitor connected in series to the resonator. The sensitivity is 0.1 wt %/Hz. We also found that the smallest resonator diameter that achieves a resolution of 0.1 wt % is 1.5 mm. Because the structure and manufacturing process are simple, we expect the proposed sensor to be useful for various kinds of liquid sensing applications.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.3 （2013） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 96-97 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/3/133_96/_article/-char/ja/