Feasibility Study for Designing a Parylene Actuator for Nano-positioning

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/04/01

タイトル(英語): Feasibility Study for Designing a Parylene Actuator for Nano-positioning

著者名: Junji Sone (Faculty of Engineering, Tokyo Polytechnic University), Laurent Jalabert (LIMMS-CNRS / IIS, The University of Tokyo), Hiroyuki Fujita (Institute of Industrial Science, The University of Tokyo)

著者名(英語): Junji Sone (Faculty of Engineering, Tokyo Polytechnic University), Laurent Jalabert (LIMMS-CNRS / IIS, The University of Tokyo), Hiroyuki Fujita (Institute of Industrial Science, The University of Tokyo)

キーワード: Nano positoning，Piezoelectric actuator，Structure design，Character of actuator，Resonance frequency

要約(英語): We considered a polymer-based piezoelectric stack actuator that is based on MEMS nano-positioning technology. We studied the structure of the actuator and important parameters of the actuation design. We used FEM to simulate the electric field, deformation and resonance frequency. On the basis of this simulation, we established the appropriate parameters for the actuator.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.4 （2013）

本誌掲載ページ: 124-125 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/4/133_124/_article/-char/ja/