湿度ドリフト補償を備えたQCMアンモニアガスセンサの作製

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/06/01

タイトル(英語): Quartz Crystal Microbalance (QCM) Sensor for NH3 Gas with the Compensation of the Humidity Drift

著者名: 牛見　義光（（株）村田製作所），伊藤　吉博（（株）村田製作所），堀内　秀哉（（株）村田製作所），門田　道雄（（株）村田製作所），野崎　良美（（株）SNT），堀田　芳生（（株）SNT），白鳥　世明（慶應義塾大学理工学部）

著者名(英語): Yoshimitsu Ushimi (Murata Manufacturing Co, Ltd.), Yoshihiro Ito (Murata Manufacturing Co, Ltd.), Hideya Horiuchi (Murata Manufacturing Co, Ltd.), Michio Kadota (Murata Manufacturing Co, Ltd.), Yoshimi Nozaki (SNT Co.), Yoshio Hotta (SNT Co.), Seimei Shiratori (Keio University)

キーワード: ガスセンサ，アンモニア，QCM，湿度ドリフト補償　　gas sensor，ammonia，QCM，compensation of the humidity drift

要約(英語): QCM sensor coated by a sensing film has been studied as a gas-sensing device with high gas selectivity and high sensor sensitivity. One of the problems to be solved for practical applications is that a resonance frequency of QCM sensor drifts due to the influence of humidity. In this study, we investigated a compensation method of the humidity drift of QCM sensor for NH3 gas by using the element coated by the reference film, that was prepared by modifying the phosphate group of zirconium phosphate of the sensing film with sodium hydroxide. The response properties of the reference element were measured. The results showed good agreement with the humidity response of the sensor element without reacting to ammonia gas. It was found that the compensation of the humidity drift was successfully accomplished by calculating the frequency difference between the sensor element and the reference element. The application to small QCM (1.3×0.9 mm) was also presented.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.6 （2013） 特集：匂い・香りのセンシングおよび再現技術の新展開

本誌掲載ページ: 184-189 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/6/133_184/_article/-char/ja/