ナノスケール摺動電気接点における接触抵抗安定性と耐摩耗性

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/06/01

タイトル(英語): Electric Contact Stability and Wear Durability at a Nanoscale Sliding Electric Contact

著者名: 冨澤　泰（BEANS研究所 3D-BEANSセンター／（株）東芝 研究開発センター／東京大学 先端科学技術研究センター），李　永芳（BEANS研究所 3D-BEANSセンター／（株）東芝 研究開発センター），古賀　章浩（BEANS研究所 3D-BEANSセンター／（株）東芝 研究開発センター），年吉　洋（東京大学 先端科学技術研究センター），安藤　泰久（BEANS研究所 3D-BEANSセンター／東京農工大学），藤田　博之（BEANS研究所 3D-BEANSセンター／東京大学 生産技術研究所）

著者名(英語): Yasushi Tomizawa (3D-BEANS Center, BEANS Laboratory/Corporate R&D Center, Toshiba Corporation/RCAST, The University of Tokyo), Yongfang Li (3D-BEANS Center, BEANS Laboratory/Corporate R&D Center, Toshiba Corporation), Akihiro Koga (3D-BEANS Center, BEANS Laboratory/Corporate R&D Center, Toshiba Corporation), Hiroshi Toshiyoshi (RCAST, The University of Tokyo), Yasuhisa Ando (3D-BEANS Center, BEANS Laboratory/Tokyo University of Agriculture and Technology), Hiroyuki Fujita (3D-BEANS Center, BEANS Laboratory/Institute of Industrial Science, The University of Tokyo)

キーワード: ナノトライボロジー，電気接点，マルチプローブデバイス，プローブ顕微鏡　　Nano Tribology，Electric Contact，Multi Probe Device，Probe Microscopy

要約(英語): To practically realize high precision processes and devices based on scanning nanoprobes, it is required to improve not only the wear durability of the probe tip but also the electric contact stability at the sliding probe electrode. It has been known that the native oxide film covering the electrode surface has a significant effect on electric contact and wear behavior, but its effect was not clearly understood. In this study, we examined in detail the influence of the surface oxide film on the relations between electric contact resistance and wear at the nanoscale sliding contact area by using a scanning probe microscopy system. It was confirmed that the electric current could be enhanced by the tunneling current passing through the relatively thin part of the oxide film. Meanwhile, when the probe slid on the conductive indium tin oxide film for a long distance, the electric contact resistance gradually increased and finally the electric current was lost. This implies that the wear debris of the oxide film adhered to the probe tip and that it formed a covering layer, which reduced the tunneling current. It is also suggested at the same time that the covering layer helped to improve the wear durability of the probe tip.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.6 （2013） 特集：匂い・香りのセンシングおよび再現技術の新展開

本誌掲載ページ: 229-236 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/6/133_229/_article/-char/ja/