Dimension Optimization of Supporting Portion for a High-Frequency Quartz Resonator

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/09/01

タイトル(英語): Dimension Optimization of Supporting Portion for a High-Frequency Quartz Resonator

著者名: Jing Ji (The Graduate School of Information, Production and Systems, Waseda University), Hiroshi Oigawa (The Graduate School of Information, Production and Systems, Waseda University), Meng Zhao (The Graduate School of Information, Production and Systems,

著者名(英語): Jing Ji (The Graduate School of Information, Production and Systems, Waseda University), Hiroshi Oigawa (The Graduate School of Information, Production and Systems, Waseda University), Meng Zhao (The Graduate School of Information, Production and Systems, Waseda University), Yupeng Zhang (The Graduate School of Information, Production and Systems, Waseda University), Satoshi Ikezawa (The Graduate School of Information, Production and Systems, Waseda University), Toshitsugu Ueda (The Graduate School of Information, Production and Systems, Waseda University)

キーワード: supporting portion，optimization，high-frequency resonator，energy trapping，coupling，finite element method

要約(英語): In this paper, dimension optimization of supporting portion was carried out for an originally designed high-frequency fundamental AT-cut quartz resonator, which has a firstly applied peripheral electrode and 10-μm-thin vibration portion to generate above 150 MHz fundamental thickness-shear vibration. Using three-dimensional finite element modeling, it is the first time; dimensions of supporting portion were optimized through improving energy trapping and reducing vibration couplings. Based on optimization results, resonators with different dimensions were fabricated and their Q-factors were measured. The experimental results were very consistent with the optimization results. Improvement of the resonator's performance ensured the validation of our method.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.9 （2013） 特集：マイクロエネルギーハーベスティング

本誌掲載ページ: 253-259 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/9/133_253/_article/-char/ja/