マイクロマシン技術を用いた小型光学式マルチガスセンサ [II]―ラマン散乱型と紫外吸収分光型ガスセンサの特性―

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/09/01

タイトル(英語): Compact Optical Multi-gas Sensors using Micromachining Technology [II]―Characteristics of Raman Scattering Gas Sensor and Ultraviolet Absorption Spectroscopy Gas Sensor―

著者名: 朝日　一平（四国総合研究所），杉本　幸代（四国総合研究所），二宮　英樹（四国総合研究所），下川　房男（香川大学），高尾　英邦（香川大学），大平　文和（香川大学），筒井　靖之（アオイ電子（株）），林　宏樹（アオイ電子（株）），今野　隆（アオイ電子（株））

著者名(英語): Ippei Asahi (Shikoku Research Institute), Sachiyo Sugimoto (Shikoku Research Institute), Hideki Ninomiya (Shikoku Research Institute), Fusao Shimokawa (Kagawa University), Hidekuni Takao (Kagawa University), Fumikazu Oohira (Kagawa University), Yasuyuki Tsutsui (Aoi Electronics), Hiroki Hayashi (Aoi Electronics), Takashi Konno (Aoi Electronics)

キーワード: マルチガスセンサ，マイクロマシン技術，ラマン効果，紫外吸収分光法，水素，アンモニア　　multi gas sensor，micromachining technology，Raman effect，ultraviolet absorption spectroscopy，hydrogen，ammonia

要約(英語): Compact optical gas sensors based on the Raman effect and ultraviolet absorption spectroscopy were developed. These sensors are miniaturized and do not require alignment, because the mirrors and optics are fixed onto a precisely machined micro optical bench made by micromachining technology. The Raman type gas sensor consists of a small DPSS laser (wavelength 532 nm, pulse energy 200 μJ, pulse width 3 ns, repetition frequency 1 kHz), the sensor chip, and the detector, which are connected by optical fibers. The UV absorption type gas sensor is consists of a D2 lamp, the sensor chip and a compact spectrometer, which are connected by optical fibers. The measured signals showed good linearity along with the gas concentrations. The limit of detection using the Raman effect was 1% for hydrogen or 0.2% for methane, and the minimum limit of detection using ultraviolet absorption spectroscopy was 10 ppm for ammonia and sulfur dioxide for an optical path length of 20 mm.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.9 （2013） 特集：マイクロエネルギーハーベスティング

本誌掲載ページ: 260-266 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/9/133_260/_article/-char/ja/