狭ギャップマイクロ熱電子発電の基礎実験

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/09/01

タイトル(英語): Fundamental Experiment of Micro Thermionic Power Generator with Narrow Gap

著者名: 宮下　英俊（東北大学マイクロシステム融合研究開発センター），陳　帥（東北大学大学院工学研究科機械システムデザイン工学専攻），小野　崇人（東北大学大学院工学研究科機械システムデザイン工学専攻）

著者名(英語): Hidetoshi Miyashita (Micro System Integration Center, Tohoku University), Chen Shuai (Department of Mechanical System and Design, Graduate School of Engineering, Tohoku University), Takahito Ono (Department of Mechanical System and Design, Graduate School of Engineering, Tohoku University)

キーワード: 熱電子発電，セシウム，マイクロ加工，仕事関数　　thermionic power generator，Cs，microfabrication，work function

要約(英語): In this research we fabricated a thermionic power generator with 10 μm gap. The thermionic power generator has an emitter and a collector. The emitter and the collector are separated with the gap via insulation spacers. A Si wafer coated by a W thin film was used as the emitter, and a Pt-coated Si wafer was used as the collector substrate. The thermionic power generator placed in a vacuum chamber, Cs gas was introduced to the chamber to enhance emission and its output characteristics are evaluated. When the emitter with an area of 25 mm2 is heated to about 980℃ by lamp heater, and temperature of the collector increases at 440℃. A maximum output of about 1.3 mW is obtained when a load resistance of 11.1 Ω is connected to the output terminal. The theoretical output of this thermionic power generator is calculated to be about 2 W. The experimental efficiency of the thermionic power generator is about 0.01%.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.9 （2013） 特集：マイクロエネルギーハーベスティング

本誌掲載ページ: 267-271 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/9/133_267/_article/-char/ja/