Sputter Deposition of Pb[Zr,Ti]O3 Thin Film onto Pre-Etched Substrate

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/01/01

タイトル(英語): Sputter Deposition of Pb[Zr,Ti]O3 Thin Film onto Pre-Etched Substrate

著者名: Kensuke Kanda (University of Hyogo), Shogo Kajimura (University of Hyogo), Junichi Inoue (University of Hyogo), Takayuki Fujita (University of Hyogo), Kazusuke Maenaka (University of Hyogo)

著者名(英語): Kensuke Kanda (University of Hyogo), Shogo Kajimura (University of Hyogo), Junichi Inoue (University of Hyogo), Takayuki Fujita (University of Hyogo), Kazusuke Maenaka (University of Hyogo)

キーワード: piezoelectric thin films，Pb[Zr,Ti]O3，sputtering，multiple DOF actuation

要約(英語): This paper demonstrates successful deposition and etching of Pb[Zr,Ti]O3 (PZT) thin films on pre-etched Si substrate with pits having depths of several hundred micrometers. Conventionally, for fabrication of microelectromechanical systems, PZT films are deposited onto a flat substrate because of inherent difficulties associated with stable deposition and processing. We successfully established the fabrication of PZT thin films and electrodes on non-flat and pre-etched substrate by using sputtering deposition and projection exposure techniques. The evaluation results reveal that the PZT thin film deposited onto the pre-etched substrate has good ferroelectric characteristics, including piezoelectric d33 constant of 80 pm/V.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.1 （2014）

本誌掲載ページ: 18-19 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/1/134_18/_article/-char/ja/