Design and Verification of Quartz Resonators with Quasi-convex Structure

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/03/01

タイトル(英語): Design and Verification of Quartz Resonators with Quasi-convex Structure

著者名: Hiroshi Oigawa (Graduate School of Information Production and Systems, Waseda University), Keisuke Hayama (Graduate School of Information Production and Systems, Waseda University), Jing Ji (Graduate School of Information Production and Systems, Waseda Un

著者名(英語): Hiroshi Oigawa (Graduate School of Information Production and Systems, Waseda University), Keisuke Hayama (Graduate School of Information Production and Systems, Waseda University), Jing Ji (Graduate School of Information Production and Systems, Waseda University), Satoshi Ikezawa (Graduate School of Information Production and Systems, Waseda University), Toshitsugu Ueda (Graduate School of Information Production and Systems, Waseda University)

キーワード: quartz resonator，quasi-convex，plano-convex，Q-factor，DRIE，FEM

要約(英語): Recently, AT-cut quartz resonators have found widespread use as RF and high-sensitivity devices. In these applications, further miniaturization and high-frequency stability are required. To achieve a high quality (Q)-factor and high productivity, the authors have proposed a novel resonator shape in which the surface is machined as a three-dimensional stripe-like structure. This shape is called quasi-convex. In this paper, we discuss the design and fabrication of quasi-convex resonators to verify their effectiveness. First, with regard to the height of the convex part and the pitch of the quasi-convex pattern, the optimal resonator design is discussed on the basis of the results of a finite-element method simulation. Then, prototypes of the quasi-convex resonators fabricated by deep reactive-ion etching and micro electro-mechanical systems fabrication technology are presented. In our experiments, the highest Q-factor is obtained when the height ratio of the convex part was 5% and the pitch is 100 µm. In addition, the Q-factor of the quasi-convex resonators is seven times greater than that of ordinary plane-shaped resonators, as confirmed using vacuum equipment.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.3 （2014） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 47-51 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/3/134_47/_article/-char/ja/