Active Touch Sensing by Multi-axial Force Measurement Using High-Resolution Tactile Sensor with Microcantilevers

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/03/01

タイトル(英語): Active Touch Sensing by Multi-axial Force Measurement Using High-Resolution Tactile Sensor with Microcantilevers

著者名: Hokuto Yokoyama (Graduate School of Engineering Science, Osaka University), Takeshi Kanashima (Graduate School of Engineering Science, Osaka University), Masanori Okuyama (Institute for NanoScience Design, Osaka University), Takashi Abe (Graduate School o

著者名(英語): Hokuto Yokoyama (Graduate School of Engineering Science, Osaka University), Takeshi Kanashima (Graduate School of Engineering Science, Osaka University), Masanori Okuyama (Institute for NanoScience Design, Osaka University), Takashi Abe (Graduate School of Science and Technology, Niigata University), Haruo Noma (Department of Media Technology, Ritsumeikan University), Teruaki Azuma (Nitta Corporation), Masayuki Sohgawa (Graduate School of Engineering Science, Osaka University/Graduate School of Science and Technology, Niigata University)

キーワード: Tactile sensor，Microcantilever，PDMS，Multi-axial force sensing，Active touch

要約(英語): A tactile sensing system that measures normal and shear (triaxial) forces has been developed, and its characteristics such as linearity and crosstalk have been evaluated. Triaxial forces are estimated from the resistance changes of NiCr thin film strain gauge attached to three microcantilevers. The output voltage of the Wheatstone bridge that comprises a gauge film and three reference resistances is acquired using an A/D converter after amplification. Triaxial forces are calculated from the output voltages of three microcantilevers by simple matrix multiplication. Nonlinearity and crosstalk are less than 4% when the normal force applied is up to 1N and less than 10% when the shear force applied is up to 0.2N. Active touch sensing was demonstrated using an object having a striped profile measuring 0.1mm in height and 1mm in width.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.3 （2014） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 58-63 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/3/134_58/_article/-char/ja/