Fabrication of Silicon Nanowire Probe with Magnet for Magnetic Resonance Force Microscopy

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/06/01

タイトル(英語): Fabrication of Silicon Nanowire Probe with Magnet for Magnetic Resonance Force Microscopy

著者名: Yong-Jun Seo (Graduate School of Engineering, Tohoku University), Masaya Toda (Graduate School of Engineering, Tohoku University/Micro System Integration Center (μSIC), Tohoku University), Yusuke Kawai (Graduate School of Engineering, Tohoku University),

著者名(英語): Yong-Jun Seo (Graduate School of Engineering, Tohoku University), Masaya Toda (Graduate School of Engineering, Tohoku University/Micro System Integration Center (μSIC), Tohoku University), Yusuke Kawai (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

キーワード: Si nanowire probe，MRFM，Force detection，Force map

要約(英語): Silicon nanowires have attracted considerable attention due to their excellent mechanical and electrical properties and widely investigated for various applications. One of the exciting applications is magnetic resonance force microscopy (MRFM), which requires a high sensitive probe for three-dimensional imaging of spin densities. In this study, we have fabricated a 160 nm-wide and 52 μm-long Si nanowire probe with a Si mirror and Ni magnet from a silicon-on-insulator wafer. The nanowire is suitable structure as the probe for a detection of MRFM. The probe shows a resonance frequency of 8.007 kHz and a Q factor of approximately 5000. Two-dimensional force mapping based on electron spin resonance has been demonstrated using the fabricated nanowire probe.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.6 （2014） 特集：第30回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文特集

本誌掲載ページ: 166-167 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/6/134_166/_article/-char/ja/