エアロゾル充填によるセンサ用マイクロ熱電変換素子の高熱抵抗化

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/07/01

タイトル(英語): Micro Thermoelectric Generators Having High Thermal-Resistance for Wireless Sensor Nodes Made by Aerosol Mold-Filling

著者名: 壷井　修（（株）富士通研究所 基盤技術研究所），高馬　悟覚（（株）富士通研究所 基盤技術研究所），西野　琢也（（株）富士通研究所 基盤技術研究所）

著者名(英語): Osamu Tsuboi (FUJITSU LABORATORIES Ltd. Devices & Materials Laboratories), Norinao Kouma (FUJITSU LABORATORIES Ltd. Devices & Materials Laboratories), Takuya Nishino (FUJITSU LABORATORIES Ltd. Devices & Materials Laboratories)

キーワード: 熱電変換，高アスペクト比，エネルギーハーベスティング，熱抵抗，センサネットワーク　　Thermo-Electric Generator，Aspect Ratio，Energy Harvesting，Thermal Resistance，Sensor Network

要約(英語): A high output voltage micro thermoelectric generator (μTEG) has been developed by fabricating thermocouples having a high aspect ratio with a high integration density. They have been made by a novel and simple fabrication method, in which thermoelectric nanopowders are filled in a photosensitive glass mold by using aerosol deposition (ASD). This method has a possibility to increase the aspect ratio of thermocouples drastically while increasing their toughness and increasing their thermal resistance. We have fabricated thermocouples with an aspect ratio of 3.3 and a high integration density of 620 TCs/cm2. Their Seebeck coefficient and electrical resistivity are 290 μV/K and 1.5 mΩcm, respectively. The μTEG reaches a thermal resistance of 3.6 K/W・cm2, output voltage efficiency of 0.18 V/K/cm2, and output power efficiency of 18 μW/K2/cm2. These HAR thermocouples have an advantage for energy harvesting from a human body because they can result in a high temperature difference because of their high thermal resistance.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.7 （2014） 特集：フィジカルセンサの基礎

本誌掲載ページ: 218-223 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/7/134_218/_article/-char/ja/