ポリエチレンテレフタレート（PET）をターゲットとして高周波スパッタリングにより成膜した有機薄膜の揮発性有機化合物の吸着特性

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/09/01

タイトル(英語): Adsorption Properties of an Organic Thin Film Prepared by an R.F. Sputtering with a Poly(Ethylene Terephthalate) (PET) Target for Volatile Organic Compounds (VOCs)

著者名: 大西　康貴（東海大学総合理工学研究科），野田　和俊（（独）産業技術総合研究所 環境管理技術研究部門），岩森　暁（東海大学総合理工学研究科／（独）産業技術総合研究所 環境管理技術研究部門）

著者名(英語): Yasutaka Ohnishi (School of Science and Technology, Tokai University), Kazutoshi Noda (Research Institute for Environmental Management Technology, National Institute of Advanced Industrial Science and Technology (AIST)), Satoru Iwamori (School of Science and Technology, Tokai University/Research Institute for Environmental Management Technology, National Institute of Advanced Industrial Science and Technology (AIST))

キーワード: 揮発性有機化合物，水晶振動子，高周波スパッタリング，ポリエチレンテレフタレート　　Volatile organic compounds (VOCs)，Quartz crystal microbalance (QCM)，R.f. sputtering，Poly(ethylene terephthalate) (PET)

要約(英語): Harmful volatile organic compounds (harmful VOCs), e.g., lacquer, thinner, solvent for paint, are used in a painting process in factories. Two kinds of organic thin films were deposited onto a quartz crystal by an r.f. sputtering with poly(tetrafluoroethylene) (PTFE) and poly(ethylene terephthalate) (PET) targets (sputtered PTFE thin film and sputtered PET film), and we evaluated detection sensitivities for the VOCs using quartz crystal microbalance (QCM) method. The frequency shift of the sputtered PTFE thin film due to the adsorption of the VOCs was larger than that of the sputtered PET thin film when acetaldehyde or toluene was used for the VOC. It suggests that the adsorption mass of these VOCs to the sputtered PTFE thin film was higher than that to the sputtered PET thin film. In addition, the adsorption masses of these VOCs decreased with increase of the environmental temperature at both of the sputtered thin films, which suggests that desorption velocities of these VOC molecules increase compared to the adsorption velocities at higher temperature. The adsorption amount of water of the sputtered PET thin film was higher than those of other VOCs, and response to the detection of water was excellent. Therefore, it is considered that the sputtered PET thin film can be used for reference sensor for water.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.9 （2014）

本誌掲載ページ: 278-283 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/9/134_278/_article/-char/ja/