Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/10/01

タイトル(英語): Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.

著者名: Agnes Tixier-Mita (Research Center for Advanced Science and Technology, The University of Tokyo), Isao Mori (Department of Electrical and Electronics Engineering, The University of Tokyo), Takuya Takahashi (Research Center for Advanced Science and Technol

著者名(英語): Agnes Tixier-Mita (Research Center for Advanced Science and Technology, The University of Tokyo), Isao Mori (Department of Electrical and Electronics Engineering, The University of Tokyo), Takuya Takahashi (Research Center for Advanced Science and Technology, The University of Tokyo), Olivier Français (SATIE/IFR d'Alembert, Ecole Normale Superieure de Cachan), Bruno Le Pioufle (SATIE/IFR d'Alembert, Ecole Normale Superieure de Cachan), Yoshio Mita (Department of Electrical and Electronics Engineering, The University of Tokyo), Hiroshi Toshiyoshi (Research Center for Advanced Science and Technology, The University of Tokyo)

キーワード: Micro-channel Integration，Cells Analyses，Bio-CMOS，Flow Impedance Spectroscopy，Suspended Electrodes.

要約(英語): The purpose of this article is to investigate the possibility to realize a fully integrated CMOS-Microfluidic device, the micro-fluidic channel being fabricated inside the CMOS chip, and passing underneath some micro-electrodes. The micro-channels are fabricated by isotropic deep-etching of silicon, which allows lateral etching, and then etching underneath the micro-electrodes. The electrodes are expected to be used for an all integrated system for electrical characterization of cells flowing underneath (flow impedance spectroscopy). This technology proposes an alternative to standard PDMS microfluidic channels which have limitations when applied to CMOS devices. Actually, these one have small size and have highly integrated pattern, making the alignment to the PDMS channel quite tricky. With the proposed technology, highly integrated device with micro-fluidics is obtainable, thanks to a submicron alignment precision. Moreover, it also gives possibilities of batch processing of integrated micro-fluidics on CMOS.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.10 （2014）

本誌掲載ページ: 320-325 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/10/134_320/_article/-char/ja/