Emitter Current Sensor for Measuring Ion Generation Rate of Corona Discharge Air Ionizer

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/01/01

タイトル(英語): Emitter Current Sensor for Measuring Ion Generation Rate of Corona Discharge Air Ionizer

著者名: Sayuri Yoshioka (Ibaraki University), Takashi Ikehata (Ibaraki University), Takashi Terashige (Hiroshima International University), Yasuna Hirata (Polytechnic University), Kazuo Okano (Polytechnic University)

著者名(英語): Sayuri Yoshioka (Ibaraki University), Takashi Ikehata (Ibaraki University), Takashi Terashige (Hiroshima International University), Yasuna Hirata (Polytechnic University), Kazuo Okano (Polytechnic University)

キーワード: ionizer，emitter current，sensor，corona discharge，semiconductor manufacturing

要約(英語): An emitter current sensor was proposed in order to measure ion generation rates of corona discharge air ionizers aiming to investigate the effects of the operating condition on the neutralization performance. The emitter current is one of the most important operating conditions of a corona discharge air ionizer. A current sensor with high sensitivity is needed because the emitter current is small (nA or pA) and the voltage applied to the emitter is high (kilo volts). So, it is desirable to separate electrically the current detector from high voltage line. The proposed sensor consists of two areas: the high voltage region for detecting the emitter current, and the low voltage region for measuring the wave forms of the emitter current by using oscilloscope. The ion generation rates were obtained from the waveform of the difference between the total current and the displacement current. A MOSFET was used for detecting the emitter current, which enables to realize low cost measurement.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.1 （2015） 特集：環境センサおよびその監視技術

本誌掲載ページ: 2023/07/12 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/1/135_7/_article/-char/ja/