Electrostatic Energy Harvester Utilizing Bipolar Charging for High Output Power

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/03/01

タイトル(英語): Electrostatic Energy Harvester Utilizing Bipolar Charging for High Output Power

著者名: Koji Sonoda (Graduate School of Engineering, University of Hyogo), Toshikazu Onishi (Graduate School of Engineering, University of Hyogo), Keidai Minami (Graduate School of Engineering, University of Hyogo), Kensuke Kanda (Graduate School of Engineering,

著者名(英語): Koji Sonoda (Graduate School of Engineering, University of Hyogo), Toshikazu Onishi (Graduate School of Engineering, University of Hyogo), Keidai Minami (Graduate School of Engineering, University of Hyogo), Kensuke Kanda (Graduate School of Engineering, University of Hyogo), Takayuki Fujita (Graduate School of Engineering, University of Hyogo), Kazusuke Maenaka (Graduate School of Engineering, University of Hyogo)

キーワード: Bipolar charging，electrostatic force，microelectromechanical systems (MEMS)，selective charging method，vibration energy harvesting

要約(英語): This paper presents an electrostatic vibration energy harvester with a bipolar-charged electret for high output power and for low electrostatic force. In conventional electrostatic energy harvesters, electrets are charged by monopolar charge (mainly by negative) with a high potential for large power harvesting. We propose a bipolar charging method in order to form an electret, which not only has negative charge but also positive charge. The electrostatic energy harvester, with a size of 13×12×1.2 mm3, was fabricated and charged by a -250-V monopolar potential and by a ±250-V bipolar potential. The maximum output power of the monopolar- and bipolar-charged harvester is 3.1μW and 9.8μW, respectively with an applied acceleration of 7 g at 352 Hz with a 0.9-MΩ load resistance. The output power is 9μW at 1.4 g and the maximum effectiveness against the velocity-damped resonant-generator (VDRG) limit is 2.5%. By using the bipolar-charged electret, the high output power obtained from the high charging potential was compared to a conventional harvester charged by the monopolar method. Further, using the finite element method (FEM) analysis, we determined that the electrostatic force that prevents harvesting mass movement is significantly reduced on the bipolar-charged electret. The electrostatic forces under static conditions along the vertical and horizontal directions obtained through the FEM analysis were reduced to 15% and 20%, respectively, from those of the monopolar-charged electret.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.3 （2015） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 91-97 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/3/135_91/_article/-char/ja/