Comparison of Ion Balance Sensors for Static Control Systems of Air Ionizer

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/03/01

タイトル(英語): Comparison of Ion Balance Sensors for Static Control Systems of Air Ionizer

著者名: Sayuri Yoshioka (Ibaraki University), Takashi Ikehata (Ibaraki University), Takashi Terashige (Hiroshima International University), Kazuo Okano (Polytechnic University)

著者名(英語): Sayuri Yoshioka (Ibaraki University), Takashi Ikehata (Ibaraki University), Takashi Terashige (Hiroshima International University), Kazuo Okano (Polytechnic University)

キーワード: ionizer，ion balance，sensor，MOSFET，semiconductor，static electricity

要約(英語): Two types of sensing systems for ion balance control, based on potential measurement and current measurement, were proposed and investigated. MOSFETs were used in both types of systems as key devices. The detection limits and response times of both systems were experimentally compared. The potential measurement type of system is superior in regard to the detection limit, and the current measurement type of system is superior in regard to the response time. The type of system should be appropriately chosen depending on the semiconductor manufacturing objective.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.3 （2015） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 108-111 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/3/135_108/_article/-char/ja/