Microheater-integrated Quartz Crystal Microbalance Array for Thermal Desorption Spectroscopy

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/03/01

タイトル(英語): Microheater-integrated Quartz Crystal Microbalance Array for Thermal Desorption Spectroscopy

著者名: Jumpei Sakai (Graduate School of Science and Technology, Niigata University), Naoyuki Iida (Graduate School of Science and Technology, Niigata University), Masayuki Sohgawa (Graduate School of Science and Technology, Niigata University), Takashi Abe (Grad

著者名(英語): Jumpei Sakai (Graduate School of Science and Technology, Niigata University), Naoyuki Iida (Graduate School of Science and Technology, Niigata University), Masayuki Sohgawa (Graduate School of Science and Technology, Niigata University), Takashi Abe (Graduate School of Science and Technology, Niigata University)

キーワード: Quartz sensor，QCM，Microheater，Thermal desorption spectroscopy，Alcohol sensor

要約(英語): In this work, we present a new design involving a microheater-integrated quartz crystal microbalance (QCM) array for thermal desorption spectroscopy. Each QCM consists of two electrodes to excite thickness-shear-mode (TSM) vibrations on the crystal back side and one microheater to increase the temperature on the crystal front side. The resonance frequency was stable when a voltage was applied to the microheater. Carbon microparticles were coated on one of the QCMs for gas adsorption, and its frequency change during the temperature increase was calculated by subtracting the frequency change of an untreated QCM. The proposed QCM array was employed to separate ethanol from methanol. The separation was successful, as confirmed via thermal desorption spectra calculated by differentiating the resonance frequency change with respect to time.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.3 （2015） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 112-113 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/3/135_112/_article/-char/ja/