Effect of Shielding a Floating Electrode on the Power Efficiency of a Micro-plasma VUV Light Source

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/03/01

タイトル(英語): Effect of Shielding a Floating Electrode on the Power Efficiency of a Micro-plasma VUV Light Source

著者名: Ryoto Sato (Department of Advanced Science and Technology, Toyota Technological Institute), Daisuke Yasumatsu (Department of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Department of Advanced Science and Technology, T

著者名(英語): Ryoto Sato (Department of Advanced Science and Technology, Toyota Technological Institute), Daisuke Yasumatsu (Department of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Department of Advanced Science and Technology, Toyota Technological Institute), Masaru Hori (Green Mobility Collaborative Research Center, Nagoya University), Minoru Sasaki (Department of Advanced Science and Technology, Toyota Technological Institute)

キーワード: VUV light source，inductively coupled micro-plasma，floating electrode，shield effect，power efficiency

要約(英語): An effective method to decrease the operational power of an MEMS plasma source in a vacuum ultraviolet light source is described. The floating electrode has been introduced to promote power efficiency during discharging. Furthermore, it was observed that shielding a major part of the floating electrode further enhanced its power saving capability. The ignition and sustaining powers are 5 W and 4.5 W, respectively. The power values are lower than those reported for an inductively coupled micro-plasma source with the bulk setup.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.3 （2015） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 114-115 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/3/135_114/_article/-char/ja/