熱線式マイクロブリッジMEMSセンサのガス検出特性

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/07/01

タイトル(英語): Characteristics of a Microbridge-type MEMS Gas Sensor for the Thermophysical Detection by a Steady-state Hot Wire Method

著者名: 矢野　満明（大阪工業大学大学院工学研究科），藤井　建多（大阪工業大学大学院工学研究科），村岡　茂信（大阪工業大学大学院工学研究科），大松　繁（大阪工業大学大学院工学研究科）

著者名(英語): Mitsuaki Yano (Graduate School of Osaka Institutes of Technology), Kenta Fujii (Graduate School of Osaka Institutes of Technology), Shigenobu Muraoka (Graduate School of Osaka Institutes of Technology), Sigeru Omatu (Graduate School of Osaka Institutes of Technology)

キーワード: マイクロブリッジ型MEMSガスセンサ，流速測定，熱伝導率測定，定常熱線法　　microbridge-type MEMS gas sensor，flow velocity measurement，thermal conductivity measurement，steady-state hot wire method

要約(英語): Thermal conductivity λ of gases was measured by a steady state method using a microbridge-type MEMS sensor fabricated on a Si substrate. The sensor consisted of a hot wire with two adjacent thermocouples (TCs) on the surface of a SiO2 microbridge. Due to the small heat capacity of the microbridge, the temperature after heating increased much faster to a saturated vale ΔT than the onset time of natural convection, enabling the ΔT to be used for steady-state analysis. In moving gases, the difference of the ΔT between the upstream and the downstream TCs was proportionally increased with the flow velocity. In static gases, this difference intrinsically became zero, and the heat flow QP from the hot wire to base SiO2/Si pad areas was calculated using the input heating power Q to yield a constant ΔT for a set of gases with known λ. Once QP was obtained, the λ of unknown gases was found to be easily estimated with errors of less than 1% by measuring the Q to yield the same ΔT.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.7 （2015） 特集：脳を読み取るセンサ技術 ～脳機能計測の最前線～

本誌掲載ページ: 263-268 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/7/135_263/_article/-char/ja/