Fabrication and Evaluation of Single-Crystal-Silicon Tunable Grating using Polymer-Based Membrane Transfer Bonding Process

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/09/01

タイトル(英語): Fabrication and Evaluation of Single-Crystal-Silicon Tunable Grating using Polymer-Based Membrane Transfer Bonding Process

著者名: Sawasdivorn Chernroj (Hane-Sasaki, Kanamori Laboratory, Tohoku University), Hisayuki Onuma (Tohoku Gakuin University), Tomohiro Suzuki (Hane-Sasaki, Kanamori Laboratory, Tohoku University), Takashi Sasaki (Hane-Sasaki, Kanamori Laboratory, Tohoku Universi

著者名(英語): Sawasdivorn Chernroj (Hane-Sasaki, Kanamori Laboratory, Tohoku University), Hisayuki Onuma (Tohoku Gakuin University), Tomohiro Suzuki (Hane-Sasaki, Kanamori Laboratory, Tohoku University), Takashi Sasaki (Hane-Sasaki, Kanamori Laboratory, Tohoku University), Hiroshi Matsuura (Tohoku Gakuin University), Kazuhiro Hane (Hane-Sasaki, Kanamori Laboratory, Tohoku University)

キーワード: Micro-electro-mechanical systems (MEMS),Wavelength Selective Switch (WSS),Grating,Mono-crystalline Silicon,Polymer membrane transfer bonding

要約(英語): We developed a fabrication process of MEMS tunable grating supported by patterned polymer. The tunable grating was fabricated on single crystal silicon with thickness of 260 nm using membrane transfer bonding technique on glass. To obtain a good defined anchor structure of grating, two kinds of polymers were used for the fabrication of bonded wafer. The characteristic of the tunable grating ribbon was measured. The tunable grating ribbon was successfully actuated with the time to peak of 26 μs. Changing of diffraction pattern of the device was also demonstrated.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.9 （2015）

本誌掲載ページ: 361-366 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/9/135_361/_article/-char/ja/