商品情報にスキップ
1 1

PZT薄膜キャパシタの作製及び自己組織化単分子膜を用いた樹脂基板への転写手法

PZT薄膜キャパシタの作製及び自己組織化単分子膜を用いた樹脂基板への転写手法

通常価格 ¥770 JPY
通常価格 セール価格 ¥770 JPY
セール 売り切れ
税込

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/10/01

タイトル(英語): Transfer Methods of PZT Thin Capacitor to Flexible Polymer by Self-Assembled Monolayers

著者名: 水野 雄貴(東京大学生産技術研究所),邊 益周(東京大学生産技術研究所),金 範埈(東京大学生産技術研究所),一木 正聡(産業技術総合研究所)

著者名(英語): Yuki Mizuno (Institute of Industrial Science, The University of Tokyo), Ikjoo Byun (Institute of Industrial Science, The University of Tokyo), Beomjoon Kim (Institute of Industrial Science, The University of Tokyo), Masaaki Ichiki (National Institute of Advanced Industrial Science and Technology (AIST))

キーワード: 自己組織化単分子膜,転写,薄膜キャパシタ,チタン酸ジルコン酸鉛(PZT),ポリジメチルシロキサン(PDMS),有機物分解塗布法  Self-assembled monolayer,transfer,thin film capacitor,lead zirconate titanate (PZT),polydimethylsiloxane (PDMS),metal organic decomposition (MOD)

要約(英語): This paper describes the fabrication method that a lead zirconate titanate (PZT) thin film capacitor, which is formed on a Si substrate by metal organic decomposition (MOD), can be easily transferred to flexible polymer (polydimethylsiloxane; PDMS) without additional chemical contamination. The thin film capacitor is composed of sandwich structure of PZT between two metal layers. To embed the capacitor structure in the polymer substrate by dry peel-off process, three kinds of self-assembled monolayers (SAMs) were investigated for adhesion or anti-adhesion layer between metal, polymer and Si substrate, respectively. Also, the MOD's sintering process with SAMs for PZT lamination was investigated. As a result, the PZT capacitors of 1 μm thickness with a perovskite structure were successfully transferred and embedded in PDMS substrate. These results will be useful for fabricating MEMS devices and integration technology of electrical device to a polymer substrate such as capacitors in 3-dimensional integration or for flexible electronics.

本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.135 No.10 (2015)

本誌掲載ページ: 382-386 p

原稿種別: 論文/日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/10/135_382/_article/-char/ja/

販売タイプ
書籍サイズ
ページ数
詳細を表示する