Terahertz Devices with Reconfigurable Metamaterials by Surface Micromachining Technique

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/11/01

タイトル(英語): Terahertz Devices with Reconfigurable Metamaterials by Surface Micromachining Technique

著者名: Zhengli Han (Institute of Industrial Science, The University of Tokyo), Kenta Kohno (Institute of Industrial Science, The University of Tokyo), Hiroyuki Fujita (Institute of Industrial Science, The University of Tokyo), Kazuhiko Hirakawa (Institute of Ind

著者名(英語): Zhengli Han (Institute of Industrial Science, The University of Tokyo), Kenta Kohno (Institute of Industrial Science, The University of Tokyo), Hiroyuki Fujita (Institute of Industrial Science, The University of Tokyo), Kazuhiko Hirakawa (Institute of Industrial Science, The University of Tokyo), Hiroshi Toshiyoshi (Institute of Industrial Science, The University of Tokyo)

キーワード: Tunable THz Devices，Reconfigurable Metamaterial，Surface MEMS，Electrostatic Actuation

要約(英語): We propose an approach to build tunable terahertz (THz) devices by using the concept of reconfigurable metamaterials developed by surface MEMS (micro electro mechanical system) technique. The implemented metamaterial is composed of an array of unit cells based on the inductor-capacitor (LC) resonators. By using the MEMS technique to reconfigure the structure of the unit cell, thus the capacitance of the resonator, we demonstrated the tunable transmission of the metamaterial device controlled by applied voltage (around 40 V). The device can be used as a tunable THz band-stop filter and an amplitude modulator with double frequency bands. By engineering the arrayed configuration for the unit cells, we propose a method to constitute a programmable THz spatial modulator, such as a THz lens, which has wide range of applications in THz spectroscopy and THz communication.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.11 （2015） 特集：メタマテリアル・プラズモニクス

本誌掲載ページ: 450-453 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/11/135_450/_article/-char/ja/