Microelectromechanical Systems Oscillator with an 80 MHz Resonator Utilizing Torsional-to-Transverse Vibration Conversion

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/12/01

タイトル(英語): Microelectromechanical Systems Oscillator with an 80 MHz Resonator Utilizing Torsional-to-Transverse Vibration Conversion

著者名: Masaya Kiso (Automotive & Industrial Systems Company, Panasonic Corporation), Hideaki Fujiura (Automotive & Industrial Systems Company, Panasonic Corporation), Mitsuhiro Okada (Automotive & Industrial Systems Company, Panasonic Corporation), Hideo Miyauch

著者名(英語): Masaya Kiso (Automotive & Industrial Systems Company, Panasonic Corporation), Hideaki Fujiura (Automotive & Industrial Systems Company, Panasonic Corporation), Mitsuhiro Okada (Automotive & Industrial Systems Company, Panasonic Corporation), Hideo Miyauchi (Automotive & Industrial Systems Company, Panasonic Corporation), Kazuya Niki (Automotive & Industrial Systems Company, Panasonic Corporation), Hiroshi Tanigawa (College of Science and Engineering, Ritsumeikan University), Kenichiro Suzuki (Research Organization of Science and Engineering, Ritsumeikan University)

キーワード: MEMS，micromechanical，oscillator，phase noise，quality factor，resonator

要約(英語): This paper describes the oscillation for a novel silicon microelectromechanical systems (MEMS) resonator which utilizes the torsional-to-transverse vibration conversion with quarter-wavelength torsional support beams. A fabricated 0.1-μm-gap resonator was measured with a laser-Doppler (LD) vibrometer to have a resonant frequency of 78.518 MHz and the Q-factor of 8.5 × 103 in vacuum. The electrical characteristic evaluated with a network analyzer for the resonator showed the electrical transmission (S21) and the phase shift of -42.7 dB and 12 degrees, respectively. Such a large insertion loss and small phase shift shows the need of compensation circuit to achieve the oscillation. We fabricate oscillation circuits and evaluate each component: i) In order to increase the phase shift, a C0 compensation technique is used to cancel feedthrough current in the resonator. This compensation technique has provided the increase of the phase shift, 70 degrees; ii) A voltage follower circuit is adapted to convert the resonator impedance, alleviating mismatch loss and thus providing the increase in the transmission of the signal up to -17.4 dB; iii) An inverter amplifier is used to amplify this signal. With a loop of these circuits with the resonator, the oscillation utilizing the torsional-to-transverse vibration conversion has successfully been achieved for the first time. The measured phase noise of the oscillator at 1 kHz offset from the carrier has been -101 dBc/Hz.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.12 （2015）

本誌掲載ページ: 496-501 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/12/135_496/_article/-char/ja/