Frequency Switching with an 80 MHz MEMS Resonator Array Utilizing Torsional-to-Transverse Vibration Conversion

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2015/12/01

タイトル(英語): Frequency Switching with an 80 MHz MEMS Resonator Array Utilizing Torsional-to-Transverse Vibration Conversion

著者名: Masaya Kiso (Automotive & Industrial Systems Company, Panasonic Corporation), Hideaki Fujiura (Automotive & Industrial Systems Company, Panasonic Corporation), Mitsuhiro Okada (Automotive & Industrial Systems Company, Panasonic Corporation), Hideo Miyauch

著者名(英語): Masaya Kiso (Automotive & Industrial Systems Company, Panasonic Corporation), Hideaki Fujiura (Automotive & Industrial Systems Company, Panasonic Corporation), Mitsuhiro Okada (Automotive & Industrial Systems Company, Panasonic Corporation), Hideo Miyauchi (Automotive & Industrial Systems Company, Panasonic Corporation), Kazuya Niki (Automotive & Industrial Systems Company, Panasonic Corporation), Hiroshi Tanigawa (College of Science and Engineering, Ritsumeikan University), Kenichiro Suzuki (Research Organization of Science and Engineering, Ritsumeikan University)

キーワード: MEMS，micromechanical，quality factor，resonator，array，frequency switching

要約(英語): A silicon microelectromechanical systems (MEMS) resonator array utilizing torsional-to-transverse vibration conversion is designed, fabricated and evaluated. The fabricated resonator array, consisting of two resonators, was measured with an impedance analyzer and compared with the performance in a unit resonator. By compensating for the quality factor decrease in the array, the reduction ratio of the motional resistance in the array was shown to be 1/1.95, which agrees well with the estimated one (1/2). A close set of two resonant frequencies for anti-symmetric and symmetric vibration mode of 78.080 MHz of 78.536 MHz, respectively, were also measured. These resonant frequencies could be successfully switched by changing the polarity of DC bias voltage. This is useful for switching the resonant frequency in resonators for timing and filtering applications.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.135 No.12 （2015）

本誌掲載ページ: 502-508 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/135/12/135_502/_article/-char/ja/