On-chip High-voltage Silicon Photovoltaic Cell Array Made by a CMOS Post-processed Device Isolation Method for Driving a MEMS Actuator in a Remote Manner

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2016/02/01

タイトル(英語): On-chip High-voltage Silicon Photovoltaic Cell Array Made by a CMOS Post-processed Device Isolation Method for Driving a MEMS Actuator in a Remote Manner

著者名: Isao Mori (The University of Tokyo), Masanori Kubota (The University of Tokyo), Eric Lebrasseur (The University of Tokyo), Yoshio Mita (The University of Tokyo)

著者名(英語): Isao Mori (The University of Tokyo), Masanori Kubota (The University of Tokyo), Eric Lebrasseur (The University of Tokyo), Yoshio Mita (The University of Tokyo)

キーワード: CMOS-MEMS integration，photovoltaic cells，post-process，remote power feed

要約(英語): A small autonomous device that integrates MEMS, CMOS and photovoltaic (PV) cells has various attractive applications. However, high voltage such as 100 V is often required to drive MEMS actuators, while a single silicon PV cell generates around 0.7 V at maximum. The authors propose a method to fabricate an on-chip high-voltage silicon PV cell device out of standard silicon PV cells for driving a MEMS actuator remotely. The device consists of many PV cells connected in series with suspended bridge wiring formed with a batch post-process. It is compatible with a standard CMOS process, and therefore monolithic CMOS-MEMS-PV integration can be easily achieved. In this paper, the fabrication method and the basic characteristics such as open circuit voltage (Voc) and short circuit current (Isc) are shown. The Voc and Isc are proportional to the number of cells in series and the area of a cell respectively. Then, a demonstration of remote power feed and control of a MEMS actuator with the proposed PV device is reported.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.136 No.2 （2016）

本誌掲載ページ: 24-30 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/136/2/136_24/_article/-char/ja/