FilmECSアレイを用いたモーションセンサーの製作と特性評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2016/04/01

タイトル(英語): Fabrication and Evaluation of the Motion Sensor using FilmECS Array

著者名: 小野寺　将（埼玉大学），蔭山　健介（埼玉大学）

著者名(英語): Masaru Onodera (Saitama University), Kensuke Kageyama (Saitama University)

キーワード: エレクトレット，モーションセンサー，超音波，シリカ凝集体　　Electret，Motion sensor，Ultrasonic，Silica agglomerates

要約(英語): Finger tracking using motion sensor has been attractive technique for non-contact operation of electric devices. Piezoelectric ultrasonic sensors can be applied to the motion sensing by the detection of the reflected waves from objects. The piezoelectric sensor, however, is impossible to detect the motion at close range because the several ultrasonic waves are overlapped. In this study, the array of electret condenser sensors with film lamination (FilmECS) was fabricated to track a finger above a mobile device. The receiving sensitivity, the transmitting power and the sensitivity of transmitting and receiving were measured to investigate the characteristics of the sensor array. The resonance peak of the fabricated FilmECS was estimated to 50-60 kHz and around 70 kHz for receiving and transmitting, respectively, Furthermore, the sharp reflected waveform from an artificial finger was obtained by the FilmECS at transmitting and receiving. Eventually, the location of the fingertip could be detected at the distance up to 3 cm between the array and the fingertip.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.136 No.4 （2016）

本誌掲載ページ: 120-126 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/136/4/136_120/_article/-char/ja/