2D Asymmetric Silicon Micromirrors with High Vibration Transmissibility for Glass-like Retinal Display

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2016/09/01

タイトル(英語): 2D Asymmetric Silicon Micromirrors with High Vibration Transmissibility for Glass-like Retinal Display

著者名: Takaki Itoh (Industrial Technology Center of Wakayama Prefecture), Toshihide Kuriyama (Kinki University), Toshiyuki Nakaie (Hanwa Electronic Ind. Co., Ltd.), Jun Matsui (Hanwa Electronic Ind. Co., Ltd.)

著者名(英語): Takaki Itoh (Industrial Technology Center of Wakayama Prefecture), Toshihide Kuriyama (Kinki University), Toshiyuki Nakaie (Hanwa Electronic Ind. Co., Ltd.), Jun Matsui (Hanwa Electronic Ind. Co., Ltd.)

キーワード: 2D asymmetric silicon micromirror,glass-like retinal display,silicon-on-insulator microelectromechanical system,two-degree-of-freedom forced vibration system,high vibration transmissibility

要約(英語): We develop 2D asymmetric micromirrors with high vibration transmissibility for a glass-like retinal display according to the National Television System Committee standard via dynamic analysis using a single external piezoelectric ceramic vibrating element. The high-speed axis can attain a relatively much larger rotation angle by the addition of translational motion that is equal to the resonant frequency directly transmitted by the low-speed axis of a rotation oscillation system. Moreover, we fabricate 2D asymmetric silicon micromirrors using a silicon-on-insulator microelectromechanical system process and obtain 70.5-Hz and 19510-Hz resonant frequencies along the low- and high-speed axes, respectively. Furthermore, we measure the scanning range on a Lissajous pattern using a scale; the scanning angles are 12.4° along the low-speed axis and 23.7° along the high-speed axis.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.136 No.9 （2016） 特集：マイクロ・ナノ医療デバイス

本誌掲載ページ: 404-407 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/136/9/136_404/_article/-char/ja/