生体膜操作用の可逆動作機構をもつ形状記憶合金厚膜マイクログリッパ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2016/10/01

タイトル(英語): Reversible Actuation Micro Gripper with Thick SMA Film for Bio-sheet Handing

著者名: 佐藤　諒（山形大学大学院理工学研究科），鎌田　隆宏（山形大学大学院理工学研究科），峯田　貴（山形大学大学院理工学研究科）

著者名(英語): Ryo Sato (Graduate School of Science and Engineering, Yamagata University), Takahiro Kamada (Graduate School of Science and Engineering, Yamagata University), Takashi Mineta (Graduate School of Science and Engineering, Yamagata University)

キーワード: マイクログリッパ，形状記憶合金，厚膜，フラッシュ蒸着　　Micro gripper，Shape memory alloy，Thick film，Flash evaporation

要約(英語): A micro-gripper of reversible operation mechanism was designed and fabricated from a flash-evaporated SMA film of 30 μm in thickness. Thin film Pt heaters, strain gauges, and Pt-Au thermo-couple circuits were integrated on the SMA gripper. The gripper is closed at low temperature because both outer and inner arms of the gripper were similarly deflected due to intrinsic film stress. The gripper has a mechanism to be opened by the outer arm heating for flat shape recovery. The deflection propertied of the SMA gripper was evaluated. The outer arm of the gripper was reversibly deformed to 15 μm or larger when it was heated in water. The gripper was not opened enough for gripping thick bio-films because the temperature of the SMA outer arm was not reached to the peak deformation temperature of the SMA film (～60℃). The inner arm was also deformed to several microns due to the thermal conduction from the heated outer arm. In air operation, the heated outer arm and non-heated inner arm were deformed to 45 μm and 15 μm, respectively. The outer arm was heated to 300oC which was too high to use for bio-film handling. Spring constants of the inner arm were measured as 29.4 N/m which corresponds to a gripping force of 1.6 mN when a 50 μm thick sheet is held by the gripper.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.136 No.10 （2016）

本誌掲載ページ: 454-459 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/136/10/136_454/_article/-char/ja/