Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/01/01

タイトル(英語): Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

著者名: Takeshi Kohno (Graduate School of Science and Technology Niigata University), Masato Mihara (Graduate School of Science and Technology Niigata University), Ataru Tanabe (Graduate School of Science and Technology Niigata University), Takashi Abe (Graduate

著者名(英語): Takeshi Kohno (Graduate School of Science and Technology Niigata University), Masato Mihara (Graduate School of Science and Technology Niigata University), Ataru Tanabe (Graduate School of Science and Technology Niigata University), Takashi Abe (Graduate School of Science and Technology Niigata University), Masanori Okuyama (Institute for NanoScience Design, Osaka University), Masayuki Sohgawa (Graduate School of Science and Technology Niigata University)

キーワード: Ti-MEMS，tactile sensor，Al2O3 thin film，BiFeO3 piezoelectric thin film

要約(英語): Insulator and piezoelectric thin films were deposited on titanium substrate, and characterized for application in tough MEMS tactile sensors. The titanium substrate was polished by buffing before the deposition of the thin films. An Al2O3 thin film was deposited as an insulator and showed good insulation characteristics on the polished titanium substrate. Piezoelectric BiFeO3 thin films were prepared by RF sputtering. The XRD pattern of the BiFeO3 thin film on the titanium substrate shows the presence of the ferroelectric phase. The polarization-electric field curve also shows a ferroelectric hysteresis loop. The results show that insulator and piezoelectric thin film can be formed on titanium substrate.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.1 （2017） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 46-47 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/1/137_46/_article/-char/ja/