橋架け構造により高い擦り耐性を実現するガラスナノピラーの作製

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/03/01

タイトル(英語): Fabrication of Bridged Glass Nanopillar Structure with High Scratch Resistance

著者名: 桑江　博之（早稲田大学 先進理工学研究科 ナノ理工学専攻 庄子習一研究室），須藤　健成（早稲田大学 先進理工学研究科 ナノ理工学専攻 庄子習一研究室），岡田　愛姫子（早稲田大学 先進理工学研究科 ナノ理工学専攻 庄子習一研究室），高山　公介（旭硝子（株） 中央研究所），庄子　習一（早稲田大学 先進理工学研究科 ナノ理工学専攻 庄子習一研究室），水野　潤（早稲田大学ナノ・ライフ創新研究機構）

著者名(英語): Hiroyuki Kuwae (Shoji Shuichi Lab, Department of Nanoscience and Nanoengineering, Waseda University), Takenari Sudo (Shoji Shuichi Lab, Department of Nanoscience and Nanoengineering, Waseda University), Akiko Okada (Shoji Shuichi Lab, Department of Nanoscience and Nanoengineering, Waseda University), Kousuke Takayama (Research Center, Asahi Glass Co., Ltd.), Shuichi Shoji (Shoji Shuichi Lab, Department of Nanoscience and Nanoengineering, Waseda University), Jun Mizuno (Research Organization for Nano & Life Innovation, Waseda University)

キーワード: 橋架けガラスナノピラー，擦り耐性，Talbot露光法，ドライエッチング，セルフクリーニングガラス，太陽電池　　Bridged glass nanopillars，Scratch resistance，Talbot lithography，Dry etching，Self-cleaning glass，Solar cell

要約(英語): In this study, we proposed bridged glass nanopillar structures with high scratch resistance. The glass nanopillars were joined each other with bridged structures. The bridged glass nanopillars were fabricated using anisotropic talbot photolithography and reactive ion etching. AFM and FE-SEM analyses showed that the bridged glass nanopillar structures were successfully fabricated by photolithography and dry etching. Scratch resistance of the bridged glass nanopillers improved seven times stronger than that of the nanopillers without bridged structures in friction test using a flannel cloth. Furthermore, bridged glass nanopillars were not collapsed through high stress friction test using a steel wool. Additionally, self-cleaning effect of the bridged glass nanopillars with superhydrophilic behavior were successfully demonstrated by spraying water droplets. We expect that the proposed bridged glass nanopillar structures will be a highly promising technology for self-cleaning glass.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.3 （2017）

本誌掲載ページ: 72-77 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/3/137_72/_article/-char/ja/