圧電ムーニー型共振マイクロアクチュエータ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/04/01

タイトル(英語): Piezoelectric Moonie-type Resonant Microactuator

著者名: 藤村　康浩（リコーインダストリアルソリューションズ（株）），塚本　貴城（東北大学大学院工学研究科），田中　秀治（東北大学大学院工学研究科）

著者名(英語): Yasuhiro Fujimura (RICOH Industrial Solutions Inc.), Takashiro Tsukamoto (Graduate School of Engineering, Tohoku University), Shuji Tanaka (Graduate School of Engineering, Tohoku University)

キーワード: スペックル，拡散板，ムーニー型アクチュエータ，PZT　　Speckle dissolution device，Moonie actuator，Piezoelectric device，PZT

要約(英語): This paper reports a piezoelectric in-plane resonant actuator for a speckle dissolution device used in a laser-type projector. An optical diffuser is oscillated by this actuator to reduce the coherency of a scanned laser beam. A PZT unimorph actuator combined with a Moonie type displacement amplifier and a resonant structure was used to obtain a large displacement. The L18 design of experiment method was used for the optimal design. Both 1-axis and 2-axis actuators were designed and fabricated. The maximμm displacement as high as 239.5 μm at a resonance frequency of 325.2 Hz was obtained for the 1-axis actuator, and the maximμm displacements of 109.5 μm and 67 μm for both x- and y- direction at resonance frequencies of 621.5 Hz and 288.5 Hz were obtained for the 2-axis actuator (10V). The actuator was also tested with a dummy optical diffuser to evaluate the influence of the additional mass.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.4 （2017）

本誌掲載ページ: 95-100 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/4/137_95/_article/-char/ja/