SOI-MEMS技術による熱式マイクロ・フローセンサの検討

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/04/01

タイトル(英語): A Study on Micro Thermal Flow Sensors Fabricated using SOI-MEMS Technology

著者名: 星野　敬亮（千葉工業大学），室　英夫（千葉工業大学）

著者名(英語): Keisuke Hoshino (Chiba Institute of Technology), Hideo Muro (Chiba Institute of Technology)

キーワード: マイクロ・フローセンサ，熱式　　micro flow sensors，thermal

要約(英語): In recent years, miniaturization and higher performance have been increasingly required for the electronic devices in the measurement system or electronics. In order to accomplish these goals, sensors and actuators using the MEMS have been widely studied. A flow sensor is one of such MEMS sensors. There are various types of flow sensors such as an electromagnetic type, a float type, an ultrasonic type, an impeller type, or a thermal type. Among them the thermal type has the potential of fulfilling the above requirements and is easy to be produced using the MEMS technology. Based on these backgrounds the micro thermal flow sensor using SOI-MEMS technology has been extensively studied. This paper presents the results of the sensitivity calculation using a simple linear model, FEM simulation of the temperature distribution, the design and measurement results of the prototypes.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.4 （2017）

本誌掲載ページ: 101-106 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/4/137_101/_article/-char/ja/