ブリッジ構造の共振子と磁歪膜をもつMEMS磁気センサ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/08/01

タイトル(英語): MEMS Magnetic Sensor with Bridge-type Resonator and Magneto-strictive Thin Film

著者名: 岡田　尚樹（山形大学大学院理工学研究科），笹渕　貴史（山形大学大学院理工学研究科），小池　邦博（山形大学大学院理工学研究科），峯田　貴（山形大学大学院理工学研究科）

著者名(英語): Naoki Okada (Yamagata University Graduate school of Science and Engineering), Takashi Sasabuchi (Yamagata University Graduate school of Science and Engineering), Kunihiro Koike (Yamagata University Graduate school of Science and Engineering), Takashi Mineta (Yamagata University Graduate school of Science and Engineering)

キーワード: 共振型センサ，FePd合金，磁歪膜，マイクロブリッジ　　Resonant-type sensor，FePd alloy，Magnetostrictive film，Micro-bridge

要約(英語): This paper reports on fabrication and characterization of resonant-type mechanical MEMS magnetic sensors using magnetostrictive FePd sputtered film. The sensor has a thin Si resonator bridge with a PZT piezoelectric thin film element for excitation. The resonator is pulled by other bridges with the FePd film when magnetic flux is applied. The sensor was fabricated from an SOI wafer by sol-gel PZT deposition, FePd sputtering, and Si etching processes. The completed sensor showed a resonant peak with a Q factor of 229 at 26.39 kHz. When magnetic flux was applied along the micro-bridges, resonant frequency drastically decreased due to relaxation of initial deflection of the resonant bridge. Magnetic flux can be detected by resonant frequency change with a sensing resolution of 0.2 Gauss per 0.1 Hz. When excitation frequency was fixed at slightly below the resonant frequency, amplitude of the bridge vibration slightly decreased with increasing magnetic flux in low magnetic flux region. High sensitive sensing of magnetic flux was difficult by the amplitude change. It was found that the magnetic sensor showed large thermal drift.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.8 （2017） 特集：磁気センサ・アクチュエータ材料とその応用

本誌掲載ページ: 234-238 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/8/137_234/_article/-char/ja/