MEMS振動子を用いた絶縁型電圧センサの高耐圧化

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/08/01

タイトル(英語): MEMS Resonator Based Insulated Voltage Sensor Withstanding Higher Voltage

著者名: 和田　祐樹（豊田工業大学），延永　尚記（豊田工業大学），熊谷　慎也（豊田工業大学），石原　裕己（矢崎総業（株） 技術研究所），石居　真（矢崎総業（株） 技術研究所），佐々木　実（豊田工業大学）

著者名(英語): Yuuki Wada (Toyota Technological Institute), Naoki Nobunaga (Toyota Technological Institute), Shinya Kumagai (Toyota Technological Institute), Hiroki Ishihara (Yazaki Corporation, Research and Technology Center), Makoto Ishii (Yazaki Corporation, Research and Technology Center), Minoru Sasaki (Toyota Technological Institute)

キーワード: MEMS振動子，共振周波数，絶縁，電圧センサ　　MEMS resonator，Resonant frequency，Isolation，Voltage sensor

要約(英語): The Si resonator is applied for measuring the voltage in a highly isolated manner. The working principle is based on the resonant frequency shift caused by the electrical field from the electrode connected to the high voltage source (supposing the battery). Here, the resonator is electrically floated, and its potential is decided by the relative position against the electrodes which are connected to the high voltage and the driving voltage. The induced voltage on the resonator is analyzed against the driving frequency. The resonance is found by the paired peaks in the amplitude curve. The setup for the electrical measurement can make the sensor system compact. A new sensor design for avoiding the electrical field concentration realizes the measurement over 400V without the breakdown. This will match with the high voltage DC power supply system.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.8 （2017） 特集：磁気センサ・アクチュエータ材料とその応用

本誌掲載ページ: 239-244 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/8/137_239/_article/-char/ja/