Vacuum Packaged Micro-Cantilever with a Magnetic Particle

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/08/01

タイトル(英語): Vacuum Packaged Micro-Cantilever with a Magnetic Particle

著者名: Nurasyikin Mohd (Graduate School of Engineering, Tohoku University), Gaopeng Xue (Graduate School of Engineering, Tohoku University), Naoki Inomata (Graduate School of Engineering, Tohoku University), Nguyen Van Toan (Graduate School of Engineering, Tohok

著者名(英語): Nurasyikin Mohd (Graduate School of Engineering, Tohoku University), Gaopeng Xue (Graduate School of Engineering, Tohoku University), Naoki Inomata (Graduate School of Engineering, Tohoku University), Nguyen Van Toan (Graduate School of Engineering, Tohoku University), Masaya Toda (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

キーワード: cantilever，vacuum packaging，magnetic sensor

要約(英語): A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370℃. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ～150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.8 （2017） 特集：磁気センサ・アクチュエータ材料とその応用

本誌掲載ページ: 245-246 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/8/137_245/_article/-char/ja/