SOI-MEMS技術による静電容量式MEMS加速度センサ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/08/01

タイトル(英語): A Study on Beam Configuration of MEMS Capacitive Accelerometers Fabricated using SOI-MEMS Technologies

著者名: 劉　健男（千葉工業大学），室　英夫（千葉工業大学）

著者名(英語): Liu Jiannan (Chiba Institute of Technology), Hideo Muro (Chiba Institute of Technology)

キーワード: 加速度センサ，静電容量櫛型電極，感度，共振周波数　　accelerometer，capacitive beam configuration，sensitivity，resonant frequency

要約(英語): Since MEMS (Micro Electro Mechanical Systems) sensors were initially commercialized as accelerometers for Airbag systems in the 1990s, they have been widely used for various applications. The common detection mechanisms for accelerometers are piezoelectric, piezorsistive or capacitive. Among them the capacitive type is easy to be produced using the MEMS technology. This paper focuses on capacitive micro accelerometers fabricated using a simple SOI-MEMS technology, investigates the dependences of their sensitivities and resonant frequencies on the beam parameters and its configuration, and describes the feasibility study on accelerometers with beam lengths as long as the side length of the proof mass.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.8 （2017） 特集：磁気センサ・アクチュエータ材料とその応用

本誌掲載ページ: 247-251 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/8/137_247/_article/-char/ja/