Tactile Device Based on Piezoelectric MEMS by Using a Polymer/PZT Laminated Structure

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/09/01

タイトル(英語): Tactile Device Based on Piezoelectric MEMS by Using a Polymer/PZT Laminated Structure

著者名: Kensuke Kanda (University of Hyogo), Takashi Okubo (University of Hyogo), Masami Shima (University of Hyogo), Takayuki Fujita (University of Hyogo), Kazusuke Maenaka (University of Hyogo)

著者名(英語): Kensuke Kanda (University of Hyogo), Takashi Okubo (University of Hyogo), Masami Shima (University of Hyogo), Takayuki Fujita (University of Hyogo), Kazusuke Maenaka (University of Hyogo)

キーワード: piezoelectric MEMS，PZT，tactile device

要約(英語): Novel miniaturized tactile devices, which provide a person with vibration stimulation, are proposed. The strategy is to hit the skin with a resonantly oscillating proof mass. The tactile devices consist of a Si proof mass and a beam formed by laminated thin-film PZT and polymer. The fabricated devices generated large displacement with high durability. Tactile experiments suggest that all examinees experienced vibration at displacement of 1.3 mm for a 4 mm × 4 mm device. For wearable monitoring systems of human activities, the energy consumption was estimated at 12 μW and the major energy loss was attributed to dielectric loss.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.9 （2017）

本誌掲載ページ: 284-289 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/9/137_284/_article/-char/ja/